Cov khoom muag
Peb Ion Beam Etching (IBE) System yog qhov siab -cov khoom siv ua cov khoom siv tau zoo tsim los rau micro-nano fabrication kev lag luam. Nws siv lub teeb tsom thiab tswj tau ion beam los ua lub cev etching ntawm cov ntaub ntawv nyias nyias -cov ntaub ntawv zaj duab xis, ua kom xaiv etching lossis nqa- tawm cov txheej txheem nrog siab precision.
Cov txheej txheem no yog cov kws tshaj lij tsim los ua cov txheej txheem ntau yam ntawm nyias - cov ntaub ntawv zaj duab xis, suav nrog tab sis tsis txwv rau Cu, Cr, Pt, Au, Ti, Ag, thiab Al₂O₃. Nws txhawb nqa tus qauv wafer qhov ntau thiab tsawg ntawm 6 ntiv tes thiab 8 ntiv tes, ua rau nws sib xws nrog cov khoom siv hluav taws xob thiab micro-electro-mechanical systems (MEMS) cov txheej txheem tsim khoom. Los ntawm leveraging qis-kub thiab qis-kev puas tsuaj etching technology, nws muab ib tug zoo tagnrho tov rau kev npaj ntawm siab -kev ua tau zoo micro-nano pab kiag li lawm.
Qhov zoo
High Precision & Txheej Txheem Tswj
Lub kaw lus tau koom ua ke nrog kev tshawb nrhiav qhov kawg ntawm qhov kawg etching, uas ua rau muaj - lub sijhawm saib xyuas thiab kev tswj xyuas meej ntawm tag nrho cov txheej txheem etching. Qhov no ua kom muaj kev rov ua tau zoo thiab raug, nrog rau qhov sib txawv ntawm qhov tsawg dua lossis sib npaug ntawm ± 5% (ob leeg hauv wafer thiab wafer-rau-wafer), lav qhov zoo sib xws - cov txiaj ntsig zoo thoob plaws ntau lawm.
Superior txheej txheem Compatibility
Nws txaus siab rau ntau-lub kaum sab xis, qis- qhov kub thiab txias (0℃- 30 degree), thiab qis-kev puas tsuaj etching yuav tsum. Qhov kev muaj peev xwm no tseem ceeb heev rau kev tiv thaiv qhov kub thiab txias- cov ntaub ntawv rhiab heev thiab tsis yooj yim, txo qis substrate puas tsuaj, thiab khaws cia cov khoom siv ntawm cov yeeb yaj kiab nyias, yog li txhim kho cov khoom tawm los thiab kev ua haujlwm zoo.
Flexible & Scalable Configuration
Txhawm rau ua kom tau raws li ntau yam kev tsim khoom thiab R & D xav tau, lub kaw lus muaj kev xaiv cov cuab yeej ua ke. Qhov kev tsim qauv no tso cai rau kev sib koom ua ke ntawm ntau cov txheej txheem chamber, ua kom yooj yim seamless txheej txheem kev koom ua ke, siab - ntim tsim, thiab ua haujlwm tau zoo automation, ua rau nws tsim nyog rau ob qho tib si kev tshawb fawb thiab kev lag luam loj.
Daim ntawv thov
Lub Ion Beam Etching System yog ib qho tseem ceeb ntawm cov khoom siv hauv kev ua haujlwm ntawm kev ua haujlwm siab heev micro-nano manufacturing, nrog rau ntau yam kev siv:
1. Semiconductor Device Fabrication
Nws yog siv rau kev ua qauv zoo ntawm cov hlau electrodes, kev sib tshuam, thiab cov qauv rooj vag hauv kev sib koom ua ke (ICs), nrog rau kev txiav thiab kev kho ntawm nyias - zaj duab xis resistors thiab capacitors.
2. MEMS & NEMS Manufacturing
Nws ua lub luag haujlwm tseem ceeb hauv kev tsim cov micro-sensors, micro-actuators, thiab lwm yam MEMS / NEMS li, ua kom muaj kev tsim cov siab -yam- piv microstructures thiab tshem tawm cov qauv nrog siab precision.
3. Optoelectronic Device Production
Nws yog siv rau kev ua ntawm nyias- cov ntaub ntawv zaj duab xis nyob rau hauv lasers, photodetectors, thiab kho qhov muag waveguides, ua kom yooj yim rau zus tau tej cov high -kev ua tau zoo optoelectronic Cheebtsam.
4. Advanced Ntim & Kev sib txuas
Nws yog siv nyob rau hauv advanced ntim technologies rau kev xaiv etching ntawm redistribution txheej (RDLs) thiab kev npaj ntawm siab -precision bump structures.
FAQ
Q: 1. Dab tsi yog Ion Beam Etching (IBE) System?
A: Ib qho Ion Beam Etching (IBE) System yog qhov siab -precision micro-nano ua cov khoom siv uas siv lub teeb tsom ion los ua lub cev etching ntawm nyias - cov ntaub ntawv zaj duab xis. Nws yog tsuas yog siv rau kev xaiv etching thiab stripping ntawm ntau yam nyias zaj duab xis, thiab yog dav siv nyob rau hauv semiconductor, MEMS, optoelectronics thiab lwm yam teb.
Q: 2. Cov ntaub ntawv dab tsi yog IBE System haum rau?
A: Qhov IBE System no tsim nyog rau kev xaiv etching lossis stripping nyias - cov ntaub ntawv zaj duab xis xws li Cu, Cr, Pt, Au, Ti, Ag, thiab Al₂O₃, thiab tuaj yeem ua tau raws li cov kev xav tau ntawm ntau hom hlau thiab dielectric nyias zaj duab xis.
Q: 3. Dab tsi wafer loj npaum li cas lub ion beam etching tshuab txhawb?
A: Lub tshuab ion beam etching txhawb nqa ob tus qauv wafer qhov ntau thiab tsawg: 6 ntiv tes thiab 8 ntiv tes, uas yog sib xws nrog cov ntsiab lus tseem ceeb hauv kev lag luam thiab ua tau raws li qhov xav tau ntawm R & D thiab me me -batch ntau lawm.
Q: 4. Dab tsi yog qhov zoo ntawm ion beam etching tshuab?
A: Ion beam etching muaj qhov zoo ntawm qhov kub thiab txias (0℃~ 30 degree), kev puas tsuaj tsawg, ntau -angle ua, thiab siab uniformity. Nws tuaj yeem txo cov kev ntxhov siab thermal thiab cov khoom puas tsuaj, thiab xyuas kom muaj kev ruaj ntseg thiab sib xws ntawm cov txheej txheem etching.
Q: 5. Dab tsi yog etching uniformity ntawm IBE System?
Yog lawm, lub tshuab ion beam etching tau koom ua ke nrog cov txheej txheem etching kawg qhov kawg, uas tuaj yeem saib xyuas cov txheej txheem etching nyob rau lub sijhawm, paub meej tswj cov txheej txheem etching, thiab zam dhau -etching lossis qis dua -etching.
Q: 6. Puas yog lub tshuab ion beam etching muaj qhov ntsuas qhov kawg?
A: Yog lawm, lub tshuab ion beam etching tau koom ua ke nrog cov txheej txheem etching qhov kawg qhov kawg, uas tuaj yeem saib xyuas cov txheej txheem etching nyob rau lub sijhawm, paub meej tswj cov txheej txheem etching, thiab zam dhau -etching lossis qis dua -etching.
Q: 7. Puas yog IBE System tuaj yeem teeb tsa nrog ntau lub tshuab ua haujlwm?
A: Yog lawm, IBE System txhawb kev xaiv pawg tsim qauv, uas tuaj yeem nruab nrog ntau cov txheej txheem etching kom tau raws li qhov xav tau ntawm cov txheej txheem hloov pauv hloov pauv thiab txhim kho kev tsim khoom.
Cim npe nrov: ibe system, Tuam Tshoj ibe system manufacturers, lwm tus neeg
