Cov khoom muag
Qhov no magnetron sputtering system yog tsim rau hlau nyias zaj duab xis deposition nyob rau hauv semiconductor manufacturing. Nws yog dav siv nyob rau hauv kev sib xyaw circuits, cov khoom siv fais fab, thiab kev ntim khoom siab heev. Lub kaw lus txhawb nqa 6 nti thiab 8 nti wafers thiab xa cov khoom ruaj khov, rov ua dua nyias zaj duab xis loj hlob rau ob qho tib si R & D thiab ntim ntau lawm.
Qhov zoo
1. Cluster style thiab modular tsim ua kom yooj yim rau kev teeb tsa thiab nthuav dav rau cov txheej txheem sib txawv.
2. Ua haujlwm siab wafer tuav nrog ua tiav cov haujlwm pabcuam ua haujlwm ruaj khov thiab txo cov kev cuam tshuam ntawm phau ntawv.
3. Ib chav tsev ib lub hom phiaj layout txhawb kev sib txuas thiab synchronous txheej txheem, txhim kho kev ua haujlwm tag nrho.
4. Kev ua haujlwm siab ntawm lub tshuab nqus tsev mus rau ~ 6E 6 Pa thiab daim ntawv ua haujlwm tsis sib xws Tsawg dua lossis sib npaug li 3% pab ua kom cov yeeb yaj kiab zoo ib yam thoob plaws wafers.
Daim ntawv thov
1. Integrated circuits: siv rau depositing hlau interconnects, electrodes, thiab barrier txheej nyob rau hauv pem hauv ntej kawg thiab rov qab kawg txheej txheem.
2. Cov khoom siv fais fab: txhawb kev tsim cov yeeb yaj kiab hlau rau electrodes, metallization, thiab passivation nyob rau hauv high voltage thiab siab zog Cheebtsam.
3. Advanced ntim: muab kev txhim khu kev qha metallization rau redistribution khaubncaws sab nraud povtseg (RDL), bumping, thiab lwm yam ntim interconnect lug.
FAQ
Q: Qhov no magnetron sputtering system siv rau dab tsi?
A: Nws yog ib qho nyias nyias -zaj duab xis tso cov cuab yeej- feem ntau yog rau tso cov yeeb yaj kiab hlau hauv kev tsim khoom semiconductor. Xav txog kev sib xyaw ua ke, cov khoom siv hluav taws xob, thiab cov txheej txheem ntim khoom siab heev- cov no yog nws qhov kev siv tseem ceeb.
Q: Dab tsi wafer qhov ntau thiab tsawg tuaj yeem ua tau?
A: Tam sim no, nws ua haujlwm nrog 6-inch thiab 8-nti wafers. Zoo meej rau ob qho tib si lab R & D ua haujlwm thiab puv ntim ntim cov kab ntau lawm.
Q: Lub tshuab nqus tsev nqus tau qis npaum li cas?
A: Peb tab tom tham txog ib puag ncig 6E-6 Pa rau lub tshuab nqus tsev. Qhov ntawd yog qhov tseem ceeb kom tau txais cov yeeb yaj kiab zoo, zoo sib xws.
Q: Yuav ua li cas yog cov yeeb yaj kiab uniformity?
A: Sheet resistance uniformity zaum ntawm Tsawg dua lossis sib npaug li 3%- yog li koj yuav tsis pom qhov hloov pauv loj thoob plaws lub wafers, uas yog qhov tseem ceeb rau kev ua tau zoo ntawm cov cuab yeej.
Q: Dab tsi ua rau qhov system no sawv cev rau kev siv txhua hnub?
A: Nws yog cov khoom me me uas ntxiv: pawg-style modular tsim (super saj zawg zog rau kev teeb tsa), siab siv wafer tuav (txiav rau ntawm phau ntawv ua haujlwm), thiab ib zaug -chamber ib leeg- lub hom phiaj layout (cia cov txheej txheem khiav hauv tib lub sijhawm, txhawb kev ua haujlwm zoo).
Q: Puas yog nws tsim nyog rau kev ntim khoom siab heev?
A: Yog lawm. Nws tau dav siv rau metallization hauv kev ntim khoom siab heev- tej yam xws li RDL (txheej txheej rov ua dua), kev sib tsoo, thiab lwm yam kev sib txuas uas xav tau cov yeeb yaj kiab hlau txhim khu kev qha.
Cim npe nrov: Tuam Tshoj magnetron sputtering system manufacturers, lwm tus neeg
