Cov khoom muag
Zoo-Tech' 8-inch IBD system yog tshwj xeeb rau qis-kub, siab- ntom, thiab siab-uniformity nyias- zaj duab xis tso rau ntawm 8-inch wafers. Nws siv tshuab sputtering nrog dual -ion- qhov chaw teeb tsa (sputtering + pab qhov chaw): lub hauv paus tseem ceeb tsim cov khoom tso tawm, thaum lub hauv paus pab ua rau hauv-situ pre-tu thiab zaj duab xis densification.
Nruab nrog 4- qhov sib hloov lub hom phiaj nruas (txhawb mus txog 4 lub hom phiaj cov ntaub ntawv) thiab lub sijhawm tiag tiag - lub sijhawm kho qhov muag (saib / kho cov yeeb yaj kiab), nws xaiv tau integrates ion beam etching (IBE) rau "deposition-etching" hauv ib chav. Ua raws li cov qauv semiconductor, nws haum 8-nti loj ntau lawm thiab R & D.
Qhov zoo
Low-Temp, High-Density Films
Creates high-quality, dense films at low temperatures and ultra-low pressure. Qhov no zam kev puas tsuaj wafer nkaus thiab ncaj qha boosts ntev - lub sij hawm ntaus ntawv durability.
Multi-Material Versatility
Nruab nrog 4- lub hom phiaj nruas, nws txhawb nqa ob qho tib si thiab cov yeeb yaj kiab sib xyaw- npog cov hlau, alloys, oxides, thiab ntau dua-tsis muaj kev sib pauv ntau zaus.
Integrated Precision Control
Xaiv rau IBE kom tau "pre- huv → deposition → etching" tag nrho hauv ib chav. Tiag -Lub sijhawm saib xyuas kom ntseeg tau tias ua tau zoo ntawm cov yeeb yaj kiab thoob plaws txhua pawg.
Wide Compatibility
Customized rau 8-nti wafers. Siv cov khoom sib xyaw ua ke, ua kom muaj kev nyab xeeb thiab kev koom ua ke nrog cov kab ntau lawm seamless.
Daim ntawv thov
Hard disk Cheebtsam:Tso cov yeeb yaj kiab tseem ceeb (piv txwv li, cov txheej txheem sib nqus sib nqus tsis zoo) rau HDD nyeem taub hau (TMR / AMR), ua kom cov hlau nplaum ruaj khov.
Cov khoom siv kho qhov muag:Npaj Bragg Stacks thiab lwm cov yeeb yaj kiab kho qhov muag rau lasers, photodetectors, thiab optical sensors.
Precision sensors:Tso cov yeeb yaj kiab ua haujlwm (magnetic, conductive) rau MEMS / magnetic sensors, txhim kho rhiab heev.0
R&D:Txhawb cov yeeb yaj kiab tshiab (2D sib xyaw, piezoelectric films) kev txhim kho hauv tsev kawm qib siab thiab cov koom haum tshawb fawb.
Tsis muaj
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Qeb |
8-nti IBD System |
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Wafer Compatibility |
8-inch (tseem ceeb); adaptable rau ib feem tshwj xeeb-loj substrates ntawm kev hloov kho |
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Ion Source Configuration |
Dual-ion- qhov chaw (sputtering ion qhov chaw + auxiliary ion qhov chaw); xaiv tau IBE (Ion Beam Etching) muaj nuj nqi |
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Target Drum Capacity |
4-slot rotating lub hom phiaj nruas (txhawb txog li 4 hom khoom sib txawv) |
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Deposition kub |
Tsawg- txheej txheem kub (tsis txhob thermal puas rau wafer thiab cov khoom siv rhiab heev) |
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Txheej Txheem Siab |
Ultra- ib puag ncig tsis tshua muaj siab (ua rau siab -cov yeeb yaj kiab ceev ceev) |
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Film Control System |
Tiag -lub sij hawm kho qhov muag tswj qhov system (saib xyuas, txheeb xyuas thiab kho cov yeeb yaj kiab hauv lub sijhawm tiag tiag) |
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Cov ntaub ntawv tso nyiaj |
Cov hlau, alloys, oxides, thiab customizable rau cov yeeb yaj kiab ua haujlwm tshiab (xws li, 2D composites, piezoelectric films) |
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Txheej txheem kev koom ua ke |
"Pre-tu-deposition-etching" txheej txheem kev sib xyaw ua ke (yeem, tib lub chamber) |
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Kev ua raws li kev lag luam |
Ua raws li cov qauv kev lag luam semiconductor |
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Cov ntsiab lus tseem ceeb |
Cov txheej txheem thoob ntiaj teb (tus nqi saib xyuas qis, hloov khoom seem yooj yim) |
FAQ
Q: Dab tsi wafer loj npaum li cas qhov system feem ntau txhawb nqa?
A: 8-inch (adaptable rau ib feem tshwj xeeb-loj substrates).
Q: Muaj pes tsawg lub hom phiaj cov ntaub ntawv tuaj yeem ua tau?
A: Txog li 4, ntawm 4-qhov chaw tig lub hom phiaj nruas.
Q: Nws puas koom ua ke etching functionality?
A: Yog, xaiv tau IBE (Ion Beam Etching) rau "deposition-etching" hauv ib chav.
Q: Dab tsi yog qhov tseem ceeb deposition kom zoo dua?
A: Tsawg-kub, siab- cov yeeb yaj kiab ceev nrog lub sijhawm tiag tiag - kho qhov muag tswj kom sib xws.
Cim npe nrov: Tuam Tshoj ion beam deposition system manufacturers, lwm tus neeg
