Cov khoom muag
Peb cov khoom siv carbon zaj duab xis sputtering yog ib qho kev mob siab rau kev tso nyiaj siab -kub carbon film tiv thaiv txheej ntawm SiC li. Nws siv cov cuab yeej ua ke uas tuaj yeem teeb tsa nrog ntau cov txheej txheem chav, thiab tuaj nrog tsis siv neeg wafer loading thiab unloading. Los ntawm kev siv DLC (pob zeb diamond-zoo li cov pa roj carbon) cov tshuab thev naus laus zis, nws muaj txiaj ntsig zoo tiv thaiv qhov chaw chalking ntawm SiC wafers thaum lub sij hawm siab - kub annealing, xa khoom ruaj khov thiab txhim khu kev tiv thaiv nto.
Qhov zoo
Cov tsim pawg txhawb nqa ntau cov txheej txheem chambers, tso cai rau kev hloov pauv kom haum rau qhov sib txawv batch qhov ntau thiab tsawg thiab txhawb nqa tag nrho cov khoom ua tau zoo.
Tsis siv neeg loading thiab unloading txo cov kev cuam tshuam ntawm phau ntawv, txhim kho cov txheej txheem rov ua dua, thiab txhawb nqa kev ua haujlwm tas li.
Cov txheej txheem zaj duab xis DLC tau zoo suppresses SiC wafer nto chalking, khaws cia qhov zoo thiab txhim kho cov cuab yeej ua haujlwm thiab kev ntseeg siab.
Lub sputtering chamber mus txog qhov kawg ntawm lub tshuab nqus tsev tsawg dua los yog sib npaug ntawm 6E-5Pa, thiab zaj duab xis thickness uniformity yog tswj nyob rau hauv ± 5%, kom ntseeg tau zoo ib yam, zoo coatings.
Kev sib raug zoo nrog 6-nti thiab 8-nti wafers ua rau lub cev hloov mus rau ntau cov kab ntau lawm thiab cov txheej txheem yuav tsum tau ua.
Daim ntawv thov
Cov cuab yeej no feem ntau yog siv rau hauv kev npaj cov pa roj carbon zaj duab xis tiv thaiv txheej rau SiC cov khoom siv, tshwj xeeb tshaj yog thaum cov txheej txheem kub ntawm - kub annealing. Nws txhawb nqa ob qho tib si 6-inch thiab 8-inch SiC wafers, ua rau nws tsim nyog rau R&D thiab kev tsim khoom loj ntawm cov khoom siv hluav taws xob thib peb xws li SiC cov khoom siv hluav taws xob, cov khoom siv RF, thiab lwm yam khoom siv hluav taws xob SiC.
FAQ
Q: 1. Cov khoom siv carbon film sputtering yog dab tsi?
A: Nws yog siv los tso siab -kub carbon zaj duab xis tiv thaiv txheej ntawm SiC, tshwj xeeb tshaj yog thaum lub sij hawm siab - kub annealing los tiv thaiv qhov chaw chalking.
Q: 2. Dab tsi yog qhov zoo ntawm cov khoom siv no?
A: Nws nta ib pawg tsim, tsis siv neeg thauj khoom / tshem tawm, DLC zaj duab xis thev naus laus zis, kev ua haujlwm siab nqus, thiab zoo tuab tuab.
Q: 3. Nws txhawb nqa dab tsi wafer?
A: Cov cuab yeej no txhawb nqa 6-nti thiab 8-nti SiC wafers rau semiconductor manufacturing thiab R & D.
Q: 4. Nws puas tuaj yeem tiv thaiv SiC wafer nto chalking?
A: Yog lawm, nws cov txheej txheem DLC zaj duab xis zoo tiv thaiv cov tawv nqaij thaum lub sij hawm siab -kub annealing thiab tiv thaiv wafer zoo.
Q: 5. Cov txheej txheem txheej txheej yog dab tsi?
A: Lub sputtering chamber ncav cuag tsawg dua lossis sib npaug ntawm 6E-5Pa lub tshuab nqus tsev, thiab cov yeeb yaj kiab thickness uniformity yog tswj tsis pub dhau ± 5%.
Q: 6. Puas yog nws tsim nyog rau kev tsim khoom loj?
A: Yog lawm, pawg qauv thiab kev tuav tsis siv neeg ua rau nws zoo tagnrho rau R&D thiab loj -scale SiC ntaus ntawv ntau lawm.
Q: 7. Cov khoom siv no feem ntau siv rau qhov twg?
A: Nws yog dav siv nyob rau hauv thib peb - tiam semiconductors rau SiC cov khoom siv fais fab, cov khoom siv RF, thiab lwm yam khoom siv hluav taws xob.
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