Kev lag luam semiconductor feem ntau xav kom muaj txiaj ntsig zoo thiab raug tshawb pom ntawm qhov tsis xws luag ntawm wafers, uas tuaj yeem ntes qhov tsis xws luag thiab ua tiav qhov tseeb - tshawb pom lub sijhawm. Cov txheej txheem nrhiav kom pom ntau dua tuaj yeem muab faib ua ob pawg: txoj kev sib cuag koob thiab tsis yog- txoj kev sib cuag, nrog rab koob tiv tauj txoj kev ua tus sawv cev ntawm txoj kev sib cuag; Txoj kev tsis sib cuag tuaj yeem muab faib ua atomic force method thiab optical method. Hauv kev siv tshwj xeeb, nws tuaj yeem muab faib ua cov duab thiab tsis yog duab.
Lub koob kov txoj kev, raws li lub npe qhia, yog txoj kev tshawb nrhiav saum npoo uas pom los ntawm kev sib cuag ntawm rab koob thiab cov khoom raug kuaj, thiab yog ib txoj hauv kev ntxov tshaj plaws hauv kev tsim khoom. Cov duab thiab contour cov ntaub ntawv ntawm qhov chaw kuaj yog kis mus rau lub sensor los ntawm lub stylus, yog li qhov loj thiab cov duab ntawm lub stylus yog ib qho tseem ceeb tshwj xeeb. Raws li lub hauv paus ntsiab lus ntawm kev soj ntsuam ntawm rab koob kov txoj kev, nws tsuas yog ua tau kom paub qhov tseeb contour ntawm cov khoom ntsuas thaum lub vojvoog ntawm rab koob tip mus txog 0. Txawm li cas los xij, lub thinner lub ntsis ntawm lub stylus, qhov siab dua generated ntawm qhov ntsuas qhov chaw, thiab lub stylus yog nquag hnav thiab tsim kua muag, khawb qhov saum npoo ntawm cov khoom ntsuas. Rau cov coated nto thiab cov hlau mos, kev tiv thaiv kev tiv thaiv tuaj yeem ua rau lub ntsej muag ntawm cov qauv kuaj tau yooj yim thiab feem ntau tsis haum rau kev siv.
Xyoo 1981, Binnig thiab Rohrer tau tsim lub Scanning Tunneling Microscope (STM). STM siv cov nyhuv quantum tunneling, nrog rau cov koob taub thiab qhov saum npoo ntawm cov khoom raug ntsuas raws li ob tug ncej. Siv ib rab koob nyias nyias mus rau qhov chaw ntawm tus qauv, thiab thaum qhov kev ncua deb ze heev, lub qhov hleb yog tsim. Qhov kev ncua deb ntawm rab koob thiab qhov saum npoo ntawm tus qauv yog khaws cia tas mus li, tso cai rau lub taub hau txav mus rau peb qhov ntev ntawm cov qauv. Qhov siab atomic xav tau los ntawm rab koob yog xa mus rau lub khoos phis tawj, thiab tom qab kev tshaj tawm - ua tiav, peb qhov morphology ntawm qhov saum npoo ntawm cov khoom kuaj tau txais. Vim muaj kev txwv ntawm STM, Binnig li al. tsim lub tshuab tsom iav atomic force (AFM) raws li STM. AFM tshawb pom qhov kev nyiam lossis kev tawm tsam ntawm cov koob thiab cov qauv, ua rau nws tsim nyog rau ob qho tib si conductive thiab tsis yog{10}}cov ntaub ntawv conductive.
Kev soj ntsuam ze ntawm - teb optical microscope (SNOM) siv cov yam ntxwv ntawm qhov ze - teb ze ntawm qhov chaw ntawm tus qauv raug kuaj xyuas kom pom nws qhov chaw morphology. Nws qhov kev daws teeb meem tuaj yeem dhau qhov kev txwv ntawm qhov kev daws teeb meem ntawm lub tshuab tsom iav (λ/2).
Cov kev siv tshuaj ntsuam xyuas feem ntau hauv kev lag luam semiconductor tam sim no suav nrog kev kuaj pom tsis siv neeg, X-ray detection, electron beam detection, etc. Scanning electron microscope (SEM) is a microscopic object research tool invented in 1965. SEM siv cov duab hluav taws xob los luam theej duab, ua rau cov hluav taws xob hluav taws xob sib txuas ua ke, uas tuaj yeem tsim cov khoom siv hluav taws xob. Hom duab no nthuav dav los ntawm taw tes thiab muaj qee qhov kev txiav txim. Qhov zoo ntawm SEM yog nws qhov kev daws teeb meem siab heev.
Kev sib xyaw ua ke ntawm X-ray tsis yog-kev ntsuas kev puas tsuaj thiab cov duab digital ua tshuab tuaj yeem ua tau siab- kev daws teeb meem ntawm kev sib txuas sab hauv hauv cov khoom siv. Agilent muaj kev sib koom ua lag luam siab, nrog cov khoom lag luam xws li 5DX system.
Automatic Optical Inspection (AOI) thev naus laus zis yog cov txheej txheem tshawb nrhiav raws li cov qauv kho qhov muag. Nws tshawb pom qhov tsis xws luag ntawm qhov chaw ntawm cov qauv los ntawm cov lus tsa suab ntawm precision ntsuas platforms, cov duab nrhiav tau, thiab cov duab digital ua tshuab. Nws qhov zoo dua yog qhov kev tshawb nrhiav ceev ceev. AOI cov cuab yeej tau tsim kho sai hauv Suav teb xyoo tas los no thiab tuaj yeem suav tias muaj peev xwm ua lag luam ntau. AOI thev naus laus zis tau txais cov duab los ntawm CCD lossis CMOS sensors, hloov lawv los ntawm analog mus rau digital, xa lawv mus rau lub computer, ua lawv digitally, thiab sib piv nrog cov qauv duab.
