Wafer tu yog hais txog cov txheej txheem ntawm kev siv tshuaj los yog lub cev txoj hauv kev los tshem tawm cov kab mob thiab oxides los ntawm qhov chaw ntawm lub wafer thaum lub sij hawm tsim khoom ntawm kev sib koom ua ke, thiaj li ua tau raws li qhov yuav tsum tau ua kom huv si ntawm wafer nto. Lub hauv paus ntsiab lus ntawm kev ntxuav wafer yog tshem tawm ntau yam impurities yam tsis muaj kev puas tsuaj rau lub wafer.
Muaj plaub yam tseem ceeb rau kev tshem tawm cov khoom: tawg, oxidative decomposition, hluav taws xob repulsion ntawm cov khoom thiab silicon wafer nto, thiab me ntsis corrosion ntawm silicon wafer nto.
Rau kev tshem tawm cov khoom siv hlau, SC-2 tov lossis HPM cov tshuaj feem ntau yog siv los txo cov ntsiab lus hlau ntawm wafer nto. Cov tshuaj SC-2 tau dhau los ua crystallization, uas tuaj yeem ua rau muaj pes tsawg tus ntawm cov khoom ntawm wafer nto tom qab ntxuav. Yog li, HF tuaj yeem siv los hloov HCL, lossis O3 ua ke nrog HF tuaj yeem siv los hloov SC-2 kev daws teeb meem kom tshem tawm cov khoom hlau zoo.
Rau cov pa phem organic, SPM tov lossis UV / ozone qhuav tu tshuab feem ntau yog siv rau kev tshem tawm.
Tom qab ntub dej ntxuav, wafer yuav tsum tau qhuav kom huv si kom ntseeg tau tias tsis muaj dej cim rau ntawm qhov chaw ua ntej nkag mus rau cov txheej txheem tom ntej. Peb hom kev ziab ntau tshaj plaws tam sim no muaj yog rotary ziab, Marangoni ziab, thiab kub isopropanol atomization ziab.
