Projection Printing
Zoo ib yam li kev yees duab yees duab, los ntawm nias lub khawm kaw, lub teeb yog npaj rau hauv zaj duab xis los ntawm lub lens thiab nthuav tawm. Tom qab ntawd, cov duab yog tau los ntawm soaking zaj duab xis nyob rau hauv ib tug tsim kev daws teeb meem los ntawm "daim duab ntxuav". Projection lithography yog cov thev naus laus zis tseem ceeb lithography rau kev sib xyaw ua ke vim nws qhov ua tau zoo thiab tsis yog -kev puas tsuaj zoo.
3 ib a. Scanning Project Printing
Kev tshawb fawb pib thaum xyoo 1970s thiab thaum ntxov 1980s. Qhov loj ntawm lub npog ntsej muag thiab cov qauv hauv lub tshuab lithography no yog 1: 1, uas txhais tau hais tias qhov loj ntawm lub npog ntsej muag yog tib yam li qhov loj ntawm cov qauv ntawm photoresist. Yog vim li cas vim li cas nws thiaj li hu ua scanning yog vim lub teeb kis tau los ntawm txoj kab nqaim mus rau lub substrate, feem ntau nthuav tawm ob peb kab ib zaug. Lub substrate yuav tsum tau tsiv mus rau nthuav tawm txhua qhov chaw nrog lub teeb lub zog.
Nta: Cov txheej txheem nodes muaj li ntawm 180 nm mus rau 130 nm, daim npog ntsej muag piv ntawm 1: 1, puv - qhov loj me.
3b ib. Stepping repeating project printing (tseem hu ua Stepper)
Kev tshawb fawb tau pib thaum xyoo 1980s thiab 1990s, siv lub lens system los tsim cov qauv ntawm lub npog ntsej muag mus rau lub substrate ib los ntawm ib qho ntawm ib qho chaw me me. Tom qab txhua qhov raug ntawm ib cheeb tsam me me, lub substrate yuav txav mus rau txoj hauj lwm tom ntej kom txog rau thaum tag nrho cov substrate raug. Ib cheeb tsam nthuav tawm yog 'steev'. Vim tias nws tau npaj los ntawm lub lens system, 5-fold phaj feem ntau yog siv thaum siv 365nm ultraviolet lub teeb, uas txhais tau hais tias qhov loj ntawm cov qauv ntawm daim npog ntsej muag yog 5 npaug ntawm qhov loj ntawm qhov tseeb photoresist. Yog li ntawd, ntau cov qauv tuaj yeem tsim rau ntawm daim npog ntsej muag, tab sis nws ua rau qhov nyuaj ntawm kev tsim cov prism system.
3c ua. Scanning Step Project Printing (tseem hu ua Scanner)
Txij li thaum lig 1990s, hom tshuab no feem ntau yog siv nyob rau hauv siab -kawg semiconductor manufacturing rau cov txheej txheem nrog ib txoj kab uas hla ntawm Less tshaj los yog sib npaug zos rau 0.18 μ m. Thaum lub sij hawm raug tus txheej txheem, lub npog ntsej muag txav mus rau hauv ib qho kev taw qhia thaum lub wafer txav synchronously nyob rau hauv ib qho kev taw qhia perpendicular rau nws.
Nta: Ntau qhov chaw saib rau txhua qhov raug; Muab nyiaj them rau qhov tsis sib xws ntawm silicon wafers; Txhim kho qhov loj uniformity ntawm tag nrho cov silicon wafer. Txawm li cas los xij, vim qhov xav tau rau kev rov qab txav, qhov kev xav tau ntawm cov tshuab tshuab tau nce ntxiv. Scanners feem ntau muaj kev ua haujlwm ntau dua li lwm cov tshuab raug, thiab lawv cov qauv tsim thiab kev tsim khoom yog qhov nyuaj heev. Kev yuav thiab tu cov nqi ntawm cov tshuab luam ntawv kuj tseem siab.
High precision ob -sided lithography
Feem ntau yog siv rau kev tshawb fawb thiab tsim cov khoom me me thiab nruab nrab- qhov sib xyaw ua ke ntawm cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, cov khoom siv hluav taws xob, cov khoom siv hluav taws xob acoustic, cov khoom siv hluav taws xob nyias nyias, thiab cov khoom siv hluav taws xob hluav taws xob.
Lub tshuab ob -sided lithography muaj xws li kev tswj cov lus tsa suab, cov duab ua haujlwm, software system, thiab cov ntaub ntawv I / O ua haujlwm tswj.
High precision ib -ib sab lithography
Lub siab- lub tshuab lithography siab tau tsim los rau ntau lub tsev kawm qib siab, tsev kawm qib siab, chaw lag luam, thiab cov chaw tshawb fawb raws li cov yam ntxwv ntawm kev siv tshuab lithography. Nws yog siv rau kev tshawb fawb thiab tsim cov khoom me me thiab nruab nrab- cov khoom siv sib xyaw ua ke, cov khoom siv hluav taws xob semiconductor, cov khoom siv hluav taws xob optoelectronic, thiab cov khoom siv acoustic yoj nto.
Nws muaj lub siab -cov lus sib dhos ua haujlwm zoo, lub ntsej muag sib cais ntawm qhov pom CCD microscopic zaub system, lub taub hau raug, lub tshuab pneumatic, lub tshuab nqus tsev vacuum, cov roj txuas ncaj qha- lub tshuab nqus tsev twj tso kua mis, lub rooj ua haujlwm tiv thaiv kev co, thiab lub thawv khoom siv.
daws qhov teeb meem ntawm misalignment tshwm sim los ntawm qhov tsis muaj peev xwm sib cais cov phiaj xwm vim tsis yog -cov substrates, tawg, thiab cov substrate tsis sib xws.
