Txhim kho qhov siab tshiab hauv Semiconductor Manufacturing! Nice Tech Launches Dual -Series LPCVD Cov Khoom Siv, Ntsuas Qhov Ntsuas thiab Ua Tau Zoo
Yog tias koj tau ua raws li kev nce qib ntawm cov khoom siv hluav taws xob semiconductor, koj yuav paub qhov loj npaum li cas cov cuab yeej LPCVD txhim khu kev qha yog -tshwj xeeb rau cov pab pawg juggling ob qho tib si R&D thiab ntau lawm. Yog vim li cas Nice Tech tsuas yog - nthuav tawm Kab rov tav thiab ntsug LPCVD series zoo li kev ua si - hloov pauv. Cov no tsis yog "lwm cov tshuab"; lawv tau tsim los kho cov ntsiab lus mob tiag tiag peb tau hnov los ntawm engineers: spotty film uniformity, nruj wafer loj txwv, thiab qhov hassle ntawm kev hloov ntawm cov txheej txheem.
Rau ib tus neeg tshiab rau LPCVD: nws yog lub hauv paus ntawm kev ua cov yeeb yaj kiab tseem ceeb ntawm cov yeeb yaj kiab semiconductor -silicon nitride, oxide, polycrystalline silicon- los ntawm cov cua sov cov roj sib txuas hauv qab qis rau lub tsho wafers. Nice Tech tau tweaking cov thev naus laus zis no tau ntau xyoo, thiab nrog rau ob tus qauv no, lawv tau zeroed nyob rau hauv cov pab pawg sib txawv xav tau.
Siv cov kab rov tav LPCVD ua ntej. Nws yog tsim rau cov neeg uas hnav ntau lub kaus mom-zoo li pab pawg R&D sim cov txheej txheem tshiab ib lub lim tiam thiab nce me me -batch ntau lawm tom ntej. Nws hloov ntawm oxidation, diffusion, thiab annealing yam tsis muaj fuss, uas txuag sij hawm ntau npaum li cas piv rau juggling cais cov cuab yeej. Peb twb pom labs khib sij hawm reconfigure khoom; qhov no txiav tawm qhov ntawd. Nws tuav 8-inch thiab me wafers, thiab cov yeeb yaj kiab sib xws? Ua raws li ± 2%. Ntxiv rau, nws tsim yog nyuaj-khiav rau lub lis piam yam tsis muaj downtime, uas tseem ceeb thaum koj nyob rau hauv ib tug nruj project ncua sij hawm.
Kab rov tav LPCVD
Tom qab ntawd muaj Vertical LPCVD, ua rau cov pab pawg loj: ntau lawm ntawm 6-12 nti wafers. Yog tias koj cov kab tag nrho hais txog automation (thiab cia peb ua tiag tiag, cov chaw niaj hnub no feem ntau yog), qhov no haum rau hauv. Tsis muaj phau ntawv tweaks ua rau cov khoom qis dua - nws syncs nrog cov kab ntau lawm ntse seamlessly. Nws ntsia rau SiC nyias- zaj duab xis tso tawm ib yam nkaus, uas yog qhov loj heev rau siab -cov khoom siv hluav taws xob kub hauv qhov dav-bandgap semiconductors. Lub uniformity ntawm no yog ± 3%, uas yog ntau tshaj li txaus rau loj-scale khiav, thiab nws ua raws li nruj ntau lawm lub hom phiaj yam tsis muaj kev txi zoo.
Vertical LPCVD
Ob leeg qhia qee qhov kev txawj ntse: kev tswj qhov kub thiab txias uas nyob hauv ± 0.5℃(tseem ceeb rau cov yeeb yaj kiab zoo ib yam) thiab 500-800℃ntau yam uas ua haujlwm rau feem ntau cov yeeb yaj kiab nyias. Thiab yog tias koj xav tau ib yam dab tsi dhau ntawm tus qauv peb zaj duab xis? Nice Tech pab pawg yuav tshem tawm cov kev cai daws teeb meem-peb tau tham nrog lawv cov engineers, thiab lawv hloov tau zoo nkauj txog kev tweaking txheej txheem rau cov kev xav tau tshwj xeeb.
Nov yog qhov peb nyiam tshaj plaws: lawv tsis yuam koj xaiv ntawm "R&D tool" thiab "cov cuab yeej tsim khoom." Kab rov tav yog zoo meej rau kev kuaj sim lithium niobate lossis quantum nti zaj duab xis; Vertical ci ntsa iab hauv cov chaw ua haujlwm churning tawm 12-inch wafers rau ICs. Thiab kev saib xyuas? Txhua 6-12 lub hlis, tsuas yog ntxuav cov kab noj hniav thiab ntsuas qhov ntsuas kub-Nice Tech txawm xa cov lus ceeb toom kom koj tsis txhob hnov qab.
Nice Tech tus thawj coj engineer muab nws yooj yim: "Peb tsis yog tsim tshuab xwb-peb tsim ib yam dab tsi uas loj hlob nrog koj txoj haujlwm." Qhov ntawd yog lub vibe ntawm no. Cov cuab yeej no tsis yog hais txog kev kuaj lub thawv; lawv hais txog kev ua kom yooj yim rau cov pab pawg ntaus lawv cov hom phiaj, txawm tias qhov ntawd yog qhov tseeb ntawm cov txheej txheem tshiab lossis kev tsim cov khoom lag luam.
Tam sim no, ua ntej - xaj xaj qhib. Yog tias koj nkees ntawm cov cuab yeej uas tsuas yog ua ib yam xwb, lossis qhov xav tau PhD kom khiav, nws tsim nyog ncav cuag lawv pab neeg. Peb xav tias qhov no tuaj yeem yog hom iav uas ua rau mob taub hau tawm ntawm nyias - zaj duab xis tso tawm - rau ob qho tib si hauv chav kuaj thiab hauv pem teb Hoobkas.
