Peb High-Temperature Oxidation RTP Equipment yog ib qho tseem ceeb thermal cov cuab yeej rau loj -scale semiconductor ntau lawm- nws txoj hauj lwm tseem ceeb yog tsim kom huv si, ntom SiO₂ zaj duab xis ntawm silicon substrates, zoo meej rau kev ua CMOS, IGBT, thiab MEMS li. Nws tau dav siv thoob plaws cov khoom siv hluav taws xob semiconductor, cov khoom siv hluav taws xob tshiab, cov khoom siv hluav taws xob siab -kawg, thiab txawm tias lub tsev kawm ntawv qib siab / kev tshawb nrhiav chaw kuaj mob rau semiconductor R&D thiab kev tsim khoom tsim.
Yuav xaiv tus qauv zoo li cas
Kev xaiv qhov zoo yuav ua rau koj qhov kev xav tau ntau lawm thiab cov txheej txheem- ntawm no yog ib qho yooj yim tawg:
1. 12-inch Model
Yog tias koj nyob rau hauv kev tsim khoom loj loj ntawm -size wafers, qhov no yog ib qho. Nws tuaj yeem tswj tau ntau dua lossis sib npaug li 125 wafers ib lub nkoj, yog li nws yog qhov zoo rau siab - ntim, loj- nplai tsim ntawm cov khoom siv hluav taws xob semiconductor. Ntxiv rau, nws muaj kev tswj xyuas qhov kub thiab txias (± 0.5 degree) thiab thaj chaw kub tsis tu ncua ntawm Ntau dua lossis sib npaug ntawm 850mm, kom ntseeg tau cov yeeb yaj kiab tuab tuab (WIW / WTW / RTR Tsawg dua lossis sib npaug ± 2%) rau txhua pawg.
2. 8-inch Model
Qhov no yog txhua yam hais txog kev hloov pauv. Nws ua haujlwm nrog ntau txoj hauv kev oxidation-qhuav oxygen (Si) thiab cov pa ntub dej (evaporation sai / da dej / HO ignition)- yog li nws haum rau cov kev xav tau ntawm cov khoom loj tshaj plaws. Kub- ntse, nws nyob ntawm 600-1150℃nrog Tsawg dua lossis sib npaug rau ± 0.5℃tswj qhov tseeb, thiab nws qhov ntsuas kub tsis tu ncua (300-860mm) muab cov yeeb yaj kiab zoo ib yam (WIW / WTW Tsawg dua lossis sib npaug ± 2%). Nws yog tsim rau 8-nti loj ntau lawm, yog li kev ua tau zoo nyob ntawm qhov sib npaug nrog qhov xav tau loj.
Leej Twg Yog Rau & Qhov Nws Fits
Loj semiconductor manufacturers: Tus qauv 12-inch yog koj mus-rau rau cranking tawm CMOS chips, IGBT hwj chim li, thiab lwm yam core Cheebtsam nyob rau hauv siab ntim.
Mainstream electronics/new zog firms: Tus qauv 8-inch ci ntsa iab ntawm no-txawm tias koj tab tom ua cov khoom siv hluav taws xob hauv tsheb, 5G kev sib txuas lus tseem ceeb, cov neeg siv khoom siv hluav taws xob, lossis lub zog hluav taws xob semiconductors, nws cov txheej txheem sib xyaw ua ke ua kom ntau lawm.
Cov tsev kawm ntawv qib siab & cov tsev kawm tshawb fawb: Tus qauv 8-inch yog qhov zoo tshaj plaws rau kev sim cov khoom siv hluav taws xob tshiab lossis tsim cov cuab yeej siv thev naus laus zis. Nws yoog tau yooj yim rau kev teeb tsa R & D sib txawv, uas yog qhov loj ntxiv rau kev ua haujlwm hauv chav kuaj.
Daim ntawv ceeb toom ceev ceev ntawm qhov zoo: Peb siv cov ntaub ntawv tshaj lij thiab cov qauv tsim qauv ntse rau lub chamber, yog li cov yeeb yaj kiab purity tau lees paub - tsis muaj cov khoom tsis zoo uas tsis xav tau messing. Thiab ob qho tib si qauv ua tau zoo ntawm cov txheej txheem ruaj khov, ua tsaug rau kev tswj xyuas qhov kub thiab txias zoo ib yam.
Tseem tsis paub tseeb tias qhov twg haum zoo tshaj? Hu rau peb, thiab peb yuav pab koj ntsia cov cuab yeej tsim nyog rau koj qhov kev ua haujlwm!
