Cov khoom muag
Vertical Wafer Dryer -qhov no yog tsim los nrog kev txiav txim siab hauv siab, tsim tshwj xeeb rau cov kev xav tau nruj ntawm cov kev lag luam.
Dab tsi ua rau nws siv tau? Rau qhov pib, muaj ob chav ywj pheej- yog li koj tuaj yeem khiav cov txheej txheem sib txawv ib txhij yam tsis muaj kev sib kis -, uas yog lub sijhawm loj heev - txuag ntawm cov kab ntau lawm. Tom qab ntawd muaj qhov kev tswj hwm qib siab; nws tsis yog "tswj" yam, tab sis zoo -tunes txhua qhov ntsuas kom muaj pob zeb sib xws - khoom. Thiab qhov zoo tshaj plaws yog muab kev ntxuav thiab ziab hauv ib chav tsev - tsis tas yuav txav wafers ntawm cov tshuab, txiav kev tuav thiab kev pheej hmoo ntawm kev puas tsuaj.
Thaum kawg ntawm lub hnub, yam manufacturers saib xyuas yog kev ntseeg siab thiab purity-thiab lub tshuab ziab khaub ncaws no muab ob qho tib si. Nws yog hom khoom siv uas tsis yog ua tau raws li cov qauv kev lag luam, tab sis haum rau cov pab pawg tsim khoom tiag tiag li cas.
Daim ntawv thov
TheVertical Wafer Dryer tsim los tswj kev ua haujlwm kom qhuav tom qab SPM kua qaub ntxuav thiab ntxuav cov organic-ob kauj ruam uas tswj qhov seem yog qhov tseem ceeb. Tsis tas li ntawd, nws tseem txhawb nqa kev tshaj tawm -kev xav tau ziab kom qhuav rau kev txhim kho photolithography, kev tshem tawm photoresist, ITO / BOE etching, thiab kiv txheej. Qhov zoo tshaj plaws ntawm no yog nws qhov sib xws: nws ua kom tsis muaj cov kab mob seem lossis cov teeb meem particle, ua kom cov txheej txheem zoo ruaj khov tom qab batch.
Vertical Wafer Dryer no kuj ci nyob rau hauv siab -stakes daim ntawv thov scenarios. Rau wafer- qib ntim ntawm micro-sensors thiab chiplets, nws khaws cov fragmentation tus nqi qis dua 1/10000-ib daim duab uas txhais ncaj qha rau kev txuag nqi rau cov tuam txhab. Tsis tas li ntawd, nws yog qhov zoo- haum rau kev ua haujlwm kub-sensitive wafers, xws li gallium arsenide thiab sapphire. Cov ntaub ntawv no yog qhov muag heev, tab sis lub tshuab ziab khaub ncaws ua tau raws li lawv cov kev xav tau zoo tshaj plaws - huv si thiab qis - puas tsuaj, yog li tsis tas yuav txhawj xeeb txog cov txheej txheem cuam tshuam.
Qhov zoo
Mayrinth nitrogen sealing, kab noj hniav thiab kab noj hniav cais, tsis muaj kev sib cuag sealing nyhuv, los xyuas kom meej cov txheej txheem ib puag ncig yuav tsum tau.
Tshawb nrhiav kev poob siab online
Electrostatic tshem tawm muaj nuj nqi, cov khoom yuav tsim hluav taws xob zoo li qub ntawm kev kub ceev, kev siv hluav taws xob hluav taws xob hluav taws xob tshem tawm hluav taws xob los ua kom cov khoom lag luam nto neutralization xeev.
Mechanical self-reset function, nres lub standby nti lub thawv tig los
Tsis muaj
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Qeb |
Yam khoom |
Specification Paub meej |
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Cov ntaub ntawv yooj yim |
Khoom npe |
Vertical ob chav chamber tshuab ziab khaub ncaws |
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Qauv nab npawb |
Semiclean-QX-61-2M-A |
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Loj (Reference) |
L × D × H=Qhov dav dav 490mm × Qhov tob 937mm × Qhov siab 1880mm |
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Qhov hnyav (kwv yees) |
260kg ua |
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Txheej Kab Kab & Cassette |
Txheej txheem kab noj hniav |
Ob chav kab noj hniav (sab sauv & qis), nws tus kheej tswj tau; tuaj yeem tso 6 "kev cai cab kuj rotor |
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Cassette Hom Siv |
KM-40N (100 hli), A182-60MB (150 mm) |
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Ntxuav & ziab qhov chaw Specs |
Nruab nrog 2pcs 4 "kev cai rotors; cassette muab los ntawm cov neeg siv khoom, rotor qhov chaw yog cov qauv tsim kawg |
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Kev khiav hauj lwm Parameters |
Lub Sijhawm Txheej Txheem |
1s - 900s; Kev saib xyuas qhov tseeb Tsawg dua lossis sib npaug ± 5% |
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Ua hauj lwm ceev |
100-2500rpm / min (kho tau ib yam khoom thiab cov txheej txheem); ceev yuam kev < ± 2% |
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Chamber Drying Temperature Range |
Yam tsawg kawg nkaus: Ntau dua lossis sib npaug li 45 degree; Qhov siab tshaj plaws: Tsawg dua lossis sib npaug li 85 degree |
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Yuav tsum tau ua kom huv huv |
Cov khoom loj dua lossis sib npaug rau 0.3μm <30 nplej / wafer |
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Khoom siv UPTIME |
Ntau dua lossis sib npaug li 95%; Nruab nrab teeb meem txhua hli- lub sijhawm ua haujlwm pub dawb Ntau dua lossis sib npaug rau 648H |
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Kev Ua Haujlwm Fragmentation Rate |
Tsawg dua lossis sib npaug li 1/10000 |
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Media Requirements |
Deionized dej |
Siab ntau: 0.2 ~ 0.4Mpa; Qhov siab tshaj plaws ntws: 0.7m³ / h |
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Nitrogen |
Siab ntau: 0.5 ~ 0.6Mpa; Kev noj ntau tshaj: 18-20m³ / h; siv rau cua sov thiab sealing |
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Kev Ua Haujlwm & Kev Tiv Thaiv |
Txau ntxuav |
Nruab nrog cov tshuaj tsuag ntxuav thiab kab noj hniav tus kheej - txheej txheem ntxuav |
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Sealing thaum ua haujlwm |
Chamber qhov rooj thiab lub cev muaj zog ncej kaw nrog nitrogen |
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Kev kuaj pom dej |
Ua- nyob rau hauv lub sensor; ua rau lub tswb nrov kom tsis txhob to |
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Kev tiv thaiv txheej txheem |
Tom qab ua tiav cov txheej txheem, interface tsis tuaj yeem ua haujlwm yog tias tsis qhib lub qhov rooj kom tshem tawm cov khoom, zam kev ua haujlwm thib ob |
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Tswj System |
Core Control |
PLC programmable tswj; txuag 10 ntu txheej txheem (10 kauj ruam ib ntu); cov neeg siv tuaj yeem teeb tsa / tawm ntawm txhua qhov sub- ua haujlwm raws li xav tau |
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Tso cai tswj |
2 hom kev tso cai tswj kev ua haujlwm, txhua qhov teeb tsa nrog kev tso cai tus password |
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Zaub muaj nuj nqi |
Screen qhia cov ntaub ntawv ntawm txhua tus txheej txheem |
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Tswj hom & Interface |
Txhua chav tuaj yeem tswj tau ntawm nws tus kheej; ua haujlwm interface: LCD kov npo |
FAQ
Cov kev lag luam twg yog qhov Vertical Wafer Dryer ua rau?
Nws yog feem ntau haum rau cov semiconductor thiab microelectronics sectors -xav cov xwm txheej uas siab -purity wafer ziab tsis yog - sib tham. Txhua feem ntawm nws cov qauv tsim leans mus rau qhov tshwj xeeb xav tau ntawm cov kev lag luam no.
Cov txheej txheem tseem ceeb twg nws tuaj yeem ua tau?
Nws npog tag nrho ntau yam ntawm cov txheej txheem wafer tseem ceeb. Tshwj xeeb, nws saib xyuas tom qab- ua haujlwm kom qhuav tom qab SPM kua qaub ntxuav, ntxuav cov kuab tshuaj organic, txhim kho photolithography, tshem tawm cov duab, ITO / BOE etching, thiab cov txheej txheej txheej -tag nrho cov ntsiab lus tseem ceeb ntawm qhov ziab kom qhuav.
Dab tsi yog qhov txiaj ntsig ntawm nws ob -kab noj hniav tsim?
Cov kab noj hniav sab sauv thiab sab qis ua haujlwm ntawm tus kheej-koj tuaj yeem tswj tau txhua qhov sib cais. Qhov ntawd txhais tau hais tias koj tuaj yeem ua cov wafers hauv ob qho tib si tib lub sijhawm, uas ua rau muaj kev ua haujlwm ntau lawm. Ntxiv rau, yog tias cov txheej txheem sib txawv xav tau qhov sib txawv, txhua qhov kab noj hniav tuaj yeem tswj hwm nws tus kheej qhov chaw zoo kawg nkaus.
Dab tsi yog tus qauv kev huv tom qab ziab?
Nws yog nruj heev, thiab yog vim li cas. Tom qab ziab, txhua lub wafer muaj tsawg dua 30 qhov uas yog 0.3μm lossis loj dua. Qhov ntawd yog txoj hauv kev nrog siab -purity xav tau ntawm semiconductor manufacturing.
Nws puas yooj yim rau kev khiav lag luam?
kiag li. Nws los nrog LCD kov npo thiab PLC programmable tswj-super intuitive. Koj tuaj yeem khaws txog 10 ntu txheej txheem, thiab txhua ntu tuaj yeem muaj 10 kauj ruam. Kuj tseem muaj dual - tso cai tus password tswj kev nyab xeeb. Txawm tias cov neeg ua haujlwm tshiab tuaj tos cov hauv paus sai sai.
Cov cuab yeej siv tau zoo npaum li cas?
Nws kev ua haujlwm ruaj khov yog qhov muag khoom loj. Cov khoom siv UPTIME hits tsawg kawg yog 95%, thiab nws khiav tsis muaj teeb meem rau qhov nruab nrab ntawm 648 teev lossis ntau dua txhua lub hlis. Qhov zoo dua, qhov wafer fragmentation tus nqi tsis ntau tshaj 1/10000 thaum lub sijhawm ua haujlwm- yog li koj yuav tsis poob ntau rau cov khoom siv glitches.
Cov xov xwm twg nws yuav tsum tau khiav?
Tsuas yog ob hom: dej deionized thiab nitrogen. Cov dej deionized xav tau qhov siab ntawm 0.2-0.4Mpa, nrog rau qhov siab tshaj plaws ntawm 0.7m³ / h. Nitrogen xav tau 0.5-0.6Mpa siab, thiab siv 18-20m³ / h feem ntau. Lawv tau siv los ntxuav, cua sov, thiab sealing raws li-txhua lub luag haujlwm tseem ceeb hauv kev ua haujlwm kom raug.
Cim npe nrov: Tuam Tshoj ntsug wafer tshuab manufacturers, lwm tus neeg
