Kev tsim cov chips semiconductor (tseem hu ua integrated circuits, ICs) feem ntau muab faib ua peb theem loj: IC tsim, IC tsim, thiab IC ntim thiab kuaj. IC tsim yog tsuas yog raws li kev tsim qauv thiab kev cai tsim ntawm nti lub hom phiaj tsim, thiab lub ntsej muag yog ua raws li cov qauv tsim rau cov kauj ruam tom ntej photolithography. IC kev tsim khoom suav nrog kev xa cov duab hluav taws xob los ntawm lub npog ntsej muag mus rau silicon wafer thiab ua tiav lub hom phiaj nti kev ua haujlwm, suav nrog cov kauj ruam xws li tshuaj kho tshuab polishing, nyias zaj duab xis deposition, photolithography, etching, thiab ion implantation. Kev ua tiav ntawm IC ntim thiab kev ua haujlwm / kev ua haujlwm ntawm cov chips yog cov txheej txheem kawg ua ntej xa khoom.
Photolithography yog cov txheej txheem nyuaj tshaj plaws thiab tseem ceeb tshaj plaws hauv cov txheej txheem semiconductor nti, uas yog lub sijhawm -siv thiab kim. Qhov nyuaj thiab cov ntsiab lus tseem ceeb hauv cov khoom siv hluav taws xob semiconductor yog nyob rau hauv yuav ua li cas los tsim lub hom phiaj Circuit Court qauv ntawm silicon wafer, uas yog tiav los ntawm photolithography. Qib ntawm photolithography ncaj qha txiav txim siab theem txheej txheem thiab qib kev ua haujlwm ntawm cov nti. Feem ntau, chips xav tau 20-30 photolithography txheej txheem thaum lub sijhawm tsim khoom, uas suav txog li 50% ntawm cov txheej txheem IC thiab ib feem peb ntawm cov nqi tsim khoom.
