Cov txheej txheem tsim wafer ntawm 200mm CMOS chips.
Tshuaj vapor deposition yog ib tug txheej txheem siv nyob rau hauv kev tsim cov microelectronic li deposit ib nyias zaj duab xis, uas tej zaum yuav ib tug dielectric khoom los yog ib tug semiconductor. Lub cev vapor deposition tshuab siv inert gases los cuam tshuam sputtering lub hom phiaj thiab tso cov khoom xav tau rau saum npoo ntawm wafer. Qhov kub thiab lub tshuab nqus tsev nyob rau hauv cov txheej txheem tshuaj tiv thaiv chamber tuaj yeem ua rau cov hlau atoms tsim cov nplej, uas tuaj yeem ua qauv thiab etched kom tau txais cov khoom siv hluav taws xob xav tau.
Kev txhim kho kho qhov muag yog txheej txheem ntawm kev hloov cov duab los ntawm photomask mus rau ib zaj duab xis nyias. Kev txhim kho kho qhov muag feem ntau suav nrog cov kauj ruam xws li txheej txheej photoresist, ci, teeb pom kev zoo, raug, thiab kev loj hlob. Qhuav etching yog feem ntau siv etching txoj kev, uas siv roj ua lub ntsiab etching nruab nrab thiab plasma tsav cov tshuaj tiv thaiv. Etching yog tshem tawm cov khoom tsis xav tau los ntawm qhov chaw.
Tshuaj Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txhuam Txheej Thaum sib tsoo, qhov sib tsoo slurry yog nyob nruab nrab ntawm lub wafer thiab sib tsoo ncoo. Cov yam tseem ceeb uas cuam tshuam rau CMP suav nrog lub siab ntawm kev sib tsoo lub taub hau thiab wafer flatness, kev sib hloov ceev, tshuaj muaj pes tsawg leeg ntawm kev sib tsoo slurry, thiab lwm yam.
