Hauv siab -kev tsim khoom kawg thiab R&D, Ion Beam Etching (IBE) cov cuab yeej sawv cev ua haujlwm tag nrho rau siab -kev ua tiav- yog tias koj xaiv qhov yog, nws yuav ua kom koj cov haujlwm ua haujlwm tau zoo thiab ua kom cov txiaj ntsig zoo ib yam. Hauv qab no tsis muaj - tsis muaj qhov tsis txaus ntseeg ntawm qhov yuav tsum nrhiav, qhov twg nws ci, thiab leej twg siv nws ib hnub thiab hnub tawm.
I. Cov Txheej Txheem Xaiv Qhov Tseem Ceeb: 3 Yuav tsum-Muaj qhov sib tw
Ua ntej tshaj, ua raws li koj qhov kev xaiv nrog koj yuav siv lub tshuab li cas -tsis muaj kev cuam tshuam nws.
1. Scenario haum: Rau kev ua haujlwm hauv chav kuaj thiab me me -batch R&D, mus nrog ib qho -cov rooj ua haujlwm uas qaij los ntawm -90℃mus rau 90℃- nws zoo meej rau kev sim cov kaum sib txawv thiab cov txheej txheem tweaking. Yog tias koj tab tom nce mus txog qhov ntau lawm, ntau -daim lub voj voog rotating lub rooj yog txoj hauv kev mus, ua kom cov khoom lag luam ruaj khov. Thiab yog tias koj ua haujlwm nrog cov khoom rhiab heev (xws li cov ntaub ntawv quantum nti), tsis txhob hla qis -kev puas tsuaj etching ua ke nrog ob qho tib si dej txias thiab helium rov qab txias-kub kub yog ib qho kev puas tsuaj rau qhov tseeb.
2. Ntsiab Specs los xyuas: Xyuas kom tseeb tias nws tuav koj cov substrate loj -feem ntau txhawb nqa txog 8 ntiv tes, txawm tias qee qhov raug txiav rau 6 ntiv tes thiab qis dua. Ion beam zog yuav tsum tau kho kom zoo los ntawm 0 mus rau 1000 eV (kev hloov kho txuas ntxiv tsis yog-kev sib tham tau yooj yim). Etching uniformity tseem ceeb heev: tsom rau Tsawg dua lossis sib npaug rau ± 3% ntawm 8-inch substrates thiab Tsawg dua lossis sib npaug rau ± 5% ntawm 6-nti sawv daws yuav (lawv suav nws li (Max - Min) / (2 × Nruab Nrab), fyi). Rau ion qhov chaw, RF sawv daws ntaus txog ± 1000 mA (zoo rau kev ua haujlwm siab dua) thaum Kaufman qhov chaw sab saum toj ntawm ± 200 mA rau kev ua haujlwm zoo dua.
3. Tsis yog -Cov yam ntxwv sib tham tau: Notch-point positioning yog ib qho yuav tsum tau rau kev sib raug zoo meej -koj tsis xav kom misplacement ua rau koj ua hauj lwm. Tsis tas li, muab ob npaug rau- xyuas nws ua haujlwm nrog koj cov ntaub ntawv: hlau (superconducting Nb, Al suav nrog), ceramics, SiC, 2D cov ntaub ntawv zoo li MoS₂, thiab cov khoom siv semiconductors yuav tsum tag nrho nyob rau hauv daim ntawv teev npe.
II. Core Application Scenarios
Cov cuab yeej IBE tsis yog ib qho -trick pony- ntawm no yog qhov uas nws xa tawm tiag tiag:
1. Hard-rau-etch cov ntaub ntawv: Xav tias superconducting hlau thiab ceramics siv nyob rau hauv aerospace Cheebtsam thiab siab -kawg cov cuab yeej- cov khoom uas tsoos etching kov tsis tau yam tsis muaj kev puas tsuaj.
2. Quantum chips: Qhov qis -kev puas tsuaj lub cev etching yog kev ua si- hloov pauv rau qubits thiab quantum dots. Ua ke nrog lub tshuab ua kom txias, thiab koj khaws cov khoom ntawm quantum zog- tseem ceeb rau kev ua haujlwm nti.
3. Advanced semiconductors: Zoo meej rau R&D thiab kev txheeb xyuas ntawm SiC, GaN, thiab 2D cov ntaub ntawv- cov thib peb -gen semiconductors xav tau kev ua tiav kom ua tiav raws li lawv lub peev xwm hauv siab - cov khoom siv thev naus laus zis.
4. Optoelectronics: 5G thiab 6G optical kev sib txuas lus pab kiag li lawm cia siab rau nws cov precision kom cov teeb liab zoo ntse -tsis muaj chaw rau sloppy etching ntawm no.
5. MEMS: High-yam- piv cov qauv hauv tsheb thiab aerospace MEMS (zoo li me me sensors lossis actuators) yog nyob rau hauv nws lub wheelhouse- kev sib raug zoo yog qhov tseem ceeb rau cov khoom me me tab sis tseem ceeb.
III. Cov Pab Pawg Cov Neeg Siv Khoom
Leej twg ua tau nqis peev hauv cov cuab yeej no? Feem ntau yog pab pawg uas xav tau qhov tseeb thiab kev ntseeg siab:
1. Cov tsev kawm tshawb fawb & cov tsev kawm qib siab: Cov chaw sim tsom rau quantum physics, cov khoom siv hluav taws xob semiconductor, lossis optoelectronics-lawv siv nws rau me me - kev sim batch, sim cov khoom tshiab, thiab cov txheej txheem ua kom zoo.
2. Quantum thev naus laus zis cov tuam txhab: Txhua lub lag luam tsim quantum chips lossis quantum sensors - lawv tsis tuaj yeem them taus kev puas tsuaj rau cov qauv rhiab, yog li qhov qis - tsim kev puas tsuaj thiab cua txias tsis yog - sib tham.
3. Semiconductor & optoelectronic manufacturers: Tuam txhab uas muag cranking tawm thib peb -gen semiconductors, optical kev sib txuas lus, los yog MEMS{2}}lawv xav tau ntau lawm muaj peev xwm ua ke nrog zoo ib yam, siab -zoo etching.
4. High-cov tuam txhab tsim khoom kawg: Aerospace cov tuam txhab tsim khoom thiab siab- cov cuab yeej siv kawg ua haujlwm nrog nkig, nyuaj-rau- cov ntaub ntawv txheej txheem-IBE tuav cov no yam tsis tas yuav tsum muaj cov txheej txheem tweaks tas li.
