Xaiv lub tshuab magnetron sputtering txheej tsis yog hais txog kev xaiv "zoo tshaj" ib qho - nws yog hais txog kev nrhiav ib qho uas haum rau koj qhov kev ua haujlwm zoo li hnab looj tes. Txawm hais tias koj tab tom churning tawm semiconductor Cheebtsam los ntawm cov batch, tweaking nyias - zaj duab xis qauv nyob rau hauv ib tug lab, los yog ntsuas versatility nrog ntau lawm xav tau, peb lub tuam txhab peb Magnetron Sputtering System txhua carve tawm ib tug qab zib qhov chaw rau ntau yam kev xav tau. Cia peb txiav los ntawm cov specs thiab phim qhov koj ua rau yam koj xav tau.
Ua ntej: Nug 3 nqe lus nug no kom txo qis
Koj tsis tas yuav dhia mus rau hauv txhua yam kev qhia tam sim ntawd. Pib nrog cov hauv paus uas ua rau koj lub hnub zoo li - mus rau - hnub ua haujlwm:
1. Puas yog koj tab tom txhim kho kev tsim khoom loj lossis iterating me me -batch R&D?
2. Koj ua haujlwm nrog substrates thiab cov ntaub ntawv dab tsi? (Xav tias wafer qhov ntau thiab tsawg, hlau vs. dielectrics.)
3. Koj puas xav tau ob txhais tes-tawm automation kom nrawm lossis yooj yim rau tweak cov txheej txheem ntawm ya?
Teb cov no tam sim ntawd taw qhia koj mus rau txoj cai. Cia peb txheeb xyuas seb txhua tus haum li cas tiag - ntiaj teb scenarios.
Rau High-Volume Industrial Production:Muaj ntau-Chamber ModelMagnetron Sputtering System
Yog tias koj lub hom phiaj yog ua kom cov kab ntau lawm txav mus yam tsis muaj kev cuam tshuam cov yeeb yaj kiab zoo -hais tias, koj tab tom tsim cov khoom siv hluav taws xob lossis cov khoom siv hluav taws xob siab -precision electronics- qhov system no yog tsim los tswj kev zom. Nws tsis yog lub tshuab xwb; nws yog ib tug streamlined workflow nyob rau hauv ib lub thawv.
Dab tsi ua rau nws sawv? Nws siv txog li 5 modular, cov txheej txheem ywj pheej, yog li koj tuaj yeem khiav lub voj voog puv txheej - cua sov, degassing, sputtering, txawm ntxuav - yam tsis muaj kev cuam tshuam los ntawm phau ntawv. Qhov ntawd txhais tau tias tsawg downtime ntawm batch thiab cov txiaj ntsig zoo ib yam, txhua lub sijhawm. Peb tau pom cov tuam txhab lag luam semiconductor txiav lub sijhawm txheej txheem los ntawm 30% tsuas yog los ntawm kev cia cov automation tswj cov kauj ruam rov ua dua.
Nws tau tsim rau 6-inch thiab 8-inch wafers, tuav cov hlau thiab dielectrics tau yooj yim, thiab ntaus lub tshuab nqus tsev qhov kawg ntawm 2 × 10⁻⁵ Pa-tseem ceeb rau ua kom cov yeeb yaj kiab nyias nyias. Thiab nrog txheej txheej tsis pub dhau ± 3%, koj yuav tsis tau txheeb los ntawm qhov tsis zoo ntawm qhov kawg ntawm kab.
Hauv luv luv: Yog tias "kev ua tau zoo" thiab "kev sib raug zoo" yog koj pab neeg cov lus buzzwords, qhov no yog koj tus neeg ua haujlwm.
Rau Flexible Industrial Needs:Muaj ib leeg-Chamber ModelMagnetron Sputtering System
Tsis yog txhua qhov chaw tsim khoom yuav tsum muaj ntau yam -chamber teeb. Tej zaum koj hloov ntawm cov hlau txheej ib lub lim tiam thiab ceramic tom ntej, los yog koj xav kom sib npaug cov zis nrog tus nqi. Qhov ntawd yog qhov Industrial Standard system ci ntsa iab-nws yog "jack ntawm txhua qhov kev lag luam" uas tseem xa tawm ntawm kev lag luam- qib kev ua haujlwm.
Peb tsim qhov no nrog practicality hauv siab. Nws yog lub zog-ntau npaum thiab siv lub hom phiaj ntse, yog li koj tsis nkim cov ntaub ntawv lossis lub zog. Lub substrate theem yog ib qho kev ua si -hloov ib yam nkaus thiab -koj tuaj yeem ua kom sov txog 650℃lossis txias nws, nyob ntawm seb koj cov khoom xav tau los lo thiab kho kom zoo. Tsis muaj rigging li cov cuab yeej ntxiv los kho qhov kub thiab txias.
Nws ua haujlwm nrog 8-inch thiab me wafers, txhawb txog li 4 lub hom phiaj phom, thiab xaiv cov khoom ntxiv xws li LOADLOCK chamber lossis multi-wafer cassette ua rau nws yooj yim los hloov raws li koj cov kev xav tau loj hlob. Ib qho khoom siv hluav taws xob uas peb ua haujlwm nrog siv rau txhua yam los ntawm cov txheej txheem sensor rau cov khoom siv hluav taws xob-lawv nyiam tias lawv tsis xav tau lub tshuab cais rau txhua txoj haujlwm.
Rau Labs & R & D:Kev tshawb fawb- Qib QauvMagnetron Sputtering System
Yog tias koj nyob hauv ib lub tsev kawm ntawv lab lossis ib qho kev pib sim tshiab nyias - zaj duab xis yees -xav quantum chips los yog advanced sensors -koj xav tau ib qho system uas xav paub ntau npaum li koj pab neeg. Kev Tshawb Fawb Tshaj Tawm ua lag luam siab - ntim automation rau qhov yooj yim rau kev sim, tweak, thiab rov ua dua yam tsis muaj teeb meem.
Qhov no yog qhov system uas peb cov neeg koom tes R&D rave txog. Nws tsuas yog hais txog txhua yam khoom uas koj tuaj yeem pov rau ntawm nws: Al, Au, Cu rau hlau; SiO₂, Tan rau dielectrics; txawm tias semiconductors. Koj tuaj yeem ntxiv cov qauv xws li lub tshuab nqus tsev ua ntej - lub tshuab nqus tsev los yog cov qauv tu cov cuab yeej raws li koj qhov project evolving- tsis tas yuav yuav tag nrho lub tshuab tshiab thaum koj qhov kev tshawb fawb tig.
Nws yog compact txaus rau qhov chaw sim, thiab qhov me me -batch muaj peev xwm txhais tau tias koj yuav tsis nkim cov khoom muaj nqis ntawm kev xeem khiav. Lub substrate theem cia koj kho qhov kub thiab txias (RT-600 degree) thiab kev sib hloov ceev (5-20 RPM), yog li koj tuaj yeem hu rau cov txheej txheem zoo meej. Rau 8-nti wafers, nws tseem hits ± 3% uniformity-yog li koj qhov kev kuaj sim txhais tau thaum koj npaj txhij.
Kev Siv Ceev: Qhov System Fits Koj Lub Luag Haujlwm?
|
Koj Txoj Haujlwm |
Pom zoo System |
Vim Li Cas Nws Nyem |
|
Pawg- tsim khoom semiconductors/electronics |
Muaj ntau-Chamber |
Automated multi-kev ua cov kauj ruam ua kom cov khoom sib xws |
|
Muaj ntau lawm nrog ntau hom txheej xav tau |
Muaj Standard |
Ntsuas tus nqi, efficiency, thiab cov khoom yooj yim |
|
Lab tshawb fawb los yog me me -batch process development |
Kev tshawb fawb tsab |
Modular tsim cia koj sim tsis muaj kev txwv |
Lus Cim Kawg: Peb Tau Txais Koj Rov Qab
Tag nrho Magnetron Sputtering System ua tau raws li cov qauv zoo, tab sis qhov ua rau peb sib cais yog qhov kev txhawb nqa. Peb pab neeg ua ke nrog cov lus teb ceev hauv zos nrog cov kws tshaj lij hauv lub hauv paus- ntxiv rau cov khoom seem ntawm tes- yog li koj tsis nyob twj ywm tos yog tias koj xav tau kev pab. Thiab yog tias koj qhov project xav tau qee yam kev cai, xws li cov substrates loj dua lossis cov txheej txheem tshwj xeeb, peb mam li kho qhov system rau koj.
Qhov zoo tshaj plaws? Koj tsis yog yuav lub tshuab xwb -koj tab tom xaiv cov tshuaj uas loj hlob nrog koj. Yog tias koj tseem nyob hauv laj kab hais txog qhov system twg haum rau koj qhov project tom ntej, tso peb pab pawg kws tshaj lij ib kab. Peb yuav taug kev los ntawm koj qhov kev ua haujlwm, teb koj cov lus nug, thiab xyuas kom koj tau txais raws nraim qhov koj xav tau.
