Cov khoom muag
Ion Beam Etching (IBE) cov cav tov yog siab -cov cuab yeej ua haujlwm raug tsim nyob ib puag ncig lub cev ion beam etching tech. Lub tswv yim tseem ceeb? Cov khoom tawg yooj yim nrog siab - lub zog ion beams kom tshem tawm cov atoms - zoo meej rau kev ua tsis zoo ntawm - kev puas tsuaj ntawm cov tawv nqaij - rau - etch cov ntaub ntawv nkig (xws li hlau thiab ceramics) thiab cov ntaub ntawv quantum nti.
Lawv tuaj nrog dual -mode worktable: ib zaug -piece ib qho nrog lub kaum sab xis hloov ntawm -90℃mus rau 90 degree, ntxiv rau ntau yam -thooj ncig rotating hom. Txawm hais tias koj tab tom ua me me - batch lab tshawb fawb lossis ntau lawm, nws yuav ua kom haum rau koj cov kev xav tau. Kuj tseem muaj cov dej txias / helium rov qab txias system kom wafers los ntawm thermal puas-yog li precision li zoo li quantum chips nyob ruaj khov tom qab ua tiav.
Nyob rau sab saum toj ntawm qhov ntawd, ion beam zog kho tau zoo ntawm 0 txog 1000 eV. Ua ke nrog etching uniformity tsawg dua los yog sib npaug rau ± 3% (rau 8-inch substrates), thiab koj tuaj yeem ntsia tau meej meej tswj qhov tob thiab cov qauv raug. Nws yog cov txheej txheem ua haujlwm tseem ceeb rau R & D ntawm cov khoom siv hluav taws xob siab tshaj (silicon carbide, 2D cov ntaub ntawv), high-precision optoelectronic device manufacturing, thiab quantum nti tsim.
Daim ntawv thov
1. Hard-rau- cov ntaub ntawv etch: superconducting hlau, ceramics (aerospace, siab-cov cuab yeej kawg)
2. Quantum chips: Tsawg-kev puas tsuaj etching ntawm qubits/quantum dots
3. Advanced semiconductors: SiC, GaN, 2D cov ntaub ntawv (R&D pov thawj)
4. Optoelectronics: Optical kev sib txuas lus (5G / 6G tshaj)
5. MEMS: Siab- yam- qauv piv (automotive, aerospace)
Qhov zoo
1. Tsawg-kev puas tsuaj & siab-precision: Lub cev etching, atomic tswj (quantum chips)
2. Cov khoom siv tawv tawv- tus phooj ywg: Superconducting hlau, ceramics, SiC (tsis muaj tweaks)
3. Cov rooj ua haujlwm yooj yim: Dual- hom (-90℃~ 90℃/ kev sib hloov) - R & D / ntau lawm
4. Kev tswj xyuas thermal: Dej / helium txias (tsis muaj thermal puas)
5. Tunable & zoo ib yam: 0-1000 eV + Tsawg dua los yog sib npaug rau ± 3% uniformity (steady batches)
Tsis muaj
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Yam khoom |
Cov cim qhia tshwj xeeb |
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Siv tau Substrate Size |
Tsawg dua lossis sib npaug li 8 nti (8 nti thiab hauv qab); ib co configurations txhawb |
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lon Beam Zog |
0-1000 eV, txhawb kev hloov kho tas li (0-1000 eV, |
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lon Beam Current |
Tsawg dua lossis sib npaug rau ± 1000 mA (rau RF ion qhov chaw); Tsawg dua lossis sib npaug rau ± 200 mA (rau Kaufman |
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Etching Uniformity |
Tsawg dua lossis sib npaug ± 3% (raws li 8-nti substrate); Tsawg dua lossis sib npaug ± 5% (raws li 6- |
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Substrate Theem Txias Txoj Kev |
Dej txias / Helium rov qab txias |
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Worktable Hom |
Dual -mode (Ib leeg- thooj hom: lub kaum sab xis adjustable ntawm-90 degree |
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Positioning Function |
Txhawb Notch-point positioning |
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Cov ntaub ntawv siv tau |
Hlau (superconducting Nb, Al, thiab lwm yam), ceramics, silicon |
FAQ
Dab tsi yog qhov max substrate loj no IBE tuav?
Txog li 8 ntiv tes- qee qhov kev teeb tsa kuj ua haujlwm nrog substrates txog 6 ntiv tes.
Yuav ua li cas adjustable ion beam zog?
0-1000 eV, nrog kev txhawb nqa txuas ntxiv.
Muaj pes tsawg worktable hom muaj?
Ob hom: ib zaug - thooj (lub kaum sab xis kho -90℃rau 90 degree) thiab ntau daim (lub voj voog tig).
Lub substrate theem txias li cas?
Dej txias / helium rov qab txias- khaws cov substrate kom zoo los ntawm thermal puas thaum lub sij hawm etching.
Nws puas tuaj yeem ua cov khoom siv superconducting (xws li Nb, Al)?
Yep-tseem tuav cov khoom siv ceramics, SiC, 2D cov ntaub ntawv (MoS₂), thiab cov khoom siv semiconductors.
Dab tsi yog cov kab hluav taws xob tam sim no rau qhov sib txawv ion?
RF ion qhov chaw: Tsawg dua lossis sib npaug rau ± 1000 mA; Kaufman ion qhov chaw: Tsawg dua lossis sib npaug rau ± 200 mA.
Dab tsi yog etching uniformity?
Tsawg dua lossis sib npaug li ± 3% rau 8-inch substrates, Tsawg dua lossis sib npaug ± 5% rau 6-nti (xws li (Max - Min) / (2 × Nruab Nrab)).
Nws puas txhawb nqa qhov chaw substrate?
Tseeb -los nrog Notch- taw tes rau qhov chaw xauv hauv kev ua haujlwm raug.
Puas muaj kev hloov kho tsim rau quantum nti ua?
Tsawg-kev puas tsuaj lub cev etching ntxiv rau dej / helium txias- txiav thermal puas thiab khaws cov khoom siv, zoo meej rau cov qauv quantum nti.
Nws puas tuaj yeem hloov pauv ntawm me me -batch R&D thiab ntau lawm?
kiag li -dual- hom worktable haum rau ob qho tib si: ib zaug -piece rau me me-batch multi-angle tests, multi-piece rau loj ntau lawm.
Cim npe nrov: Tuam Tshoj ion beam etching khoom manufacturers, lwm tus neeg
